Amine functionalized SU-8 layer guiding Love mode surface acoustic wave
نویسندگان
چکیده
منابع مشابه
SU-8 Guiding Layer for Love Wave Devices
SU-8 is a technologically important photoresist used extensively for thefabrication of microfluidics and MEMS, allowing high aspect ratio structures to beproduced. In this work we report the use of SU-8 as a Love wave sensor guiding layerwhich allows the possibility of integrating a guiding layer with flow cell during fabrication.Devices were fabricated on ST-cut quartz substrates with a single...
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4,444,879 A * 4/1984 Foster .................. GO1N 33,545 422,400 7,317,533 B2 1/2008 Chiarello et al. 7,847,948 B2 12/2010 Lee 7,871,789 B2 1/2011 Yonehara et al. 7,951,529 B2 5, 2011 Li et al. 8,023,109 B2 9/2011 Yamamichi et al. 8,026,071 B2 9, 2011 Chin et al. 2005, OO14135 A1 1, 2005 Hill et al. 2006/0134695 A1 2007. O148670 A1 2009/0239766 A1 2009,0263787 A1 2009/0275061 A1 2009,0280575 ...
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ژورنال
عنوان ژورنال: Sensors and Actuators B: Chemical
سال: 2010
ISSN: 0925-4005
DOI: 10.1016/j.snb.2009.09.011